Ultra-Precision Metrology and Manufacturing (UPM2) Laboratory

초정밀 광측정 및 가공 연구실

Department of Mechanical Engineering (ME) 기계항공학부 기계공학과

KAIST (Korea Advanced Institute of Science and Technology), South Korea

Research Objective (본 연구단의 연구목표)

Advancing ultra-precision light source technology from IR to EUV regime using femtosecond pulse lasers, and interdisciplinary applications including high-precision optical metrology, nano/micro material processing/synthesis, precision spectroscopy, time/frequency standards, and future space missions.

본 연구단은 극초단 레이저를 공통 기반으로 하여, 적외선(IR)부터 극자외선(EUV) 영역에 이르는 광대역(broadband) 가간섭(coherent) 광원기술을 개발하고, 이를 초정밀 측정기술, 초정밀 광가공/합성/패터닝 기술, 시간/주파수 표준 확립 및 차세대 우주 미션에 이르는 다양한 응용분야에 적용하는 연구를 수행하고 있습니다.

The objective of our research is to exploit the newly emerging field of ultrafast optics so as to establish ultra-precision technologies that will enable nano-fabrication and metrology over extensive ranges as demanded in the next generation of precision engineering. To the end, a systematic approach will be pursued to generate noble coherent light sources covering the whole optical spectrum spanning from the THz wave to the EUV by making the most of femtosecond laser pulses. The study aiming to investigate ultrafast optics for improving the level of ultraprecision comprises a series of research subjects that are categorized into five groups as follows:


  1. Developments of new ultrafast light sources (차세대 초고속 광원의 개발)
  2. Ultra-precision dimensional metrology (초정밀 광측정 기술)
  3. Ultrafast photonics for nano & micro manufacturing (나노/마이크로 광가공 기술)
  4. Ultrafast photonics for next-generation space missions (차세대 우주 측정미션)
  5. Ultrafast plasmonics and coherent EUV generation (초고속 플라즈모닉스 기술)

These itemized R&D subjects are investigated individually in parallel with each other, with focus on creating their possible contributions for the advance of fundamental ultra-precision science and technology. And, at the same time, the achieved results of the subject will be synthesized and combined together to demonstrate their usefulness as basic core technologies enabling a wealth of industrial applications of ultra-precision.

Detailed Research Subjects (세부 연구주제)

    • Development and stabilization of ultrafast light sources (초고속 광원의 개발 및 광출력, 주파수, 위상 안정화)
    • High-precision surface metrology using femtosecond light pulses (펨토초 레이저 기반 초정밀 표면형상 측정)
    • High-precision time-of-flight (TOF) measurement using ultrafast light pulses (초고속 펄스 정밀 비행시간 측정)
    • Precision spectroscopic LIDAR using two femtosecond lasers (두 개의 광 빗을 이용한 초정밀 분광 라이다)
    • Real-time absolute distance measurement by multiple wavelength referenced to the frequency comb (광 빗 기반 다중 광주파수를 이용한 실시간 절대거리 측정)
    • Direct laser writing (DLW) of laser-induced-graphene (LIG) electronics using ultrafast laser pulses (초고속 레이저 기반 레이저-유도-그래핀 직접묘화)
    • Synthesis of laser-induced-graphene (LIG) on top of various substrates (초박막 레이저-유도-그래핀 전자소자 및 광학소자 생성/합성)
    • High-power Yb-fiber femtosecond laser for non-thermal material processing (초정밀 비열 가공을 위한 고출력 펨토초 레이저 개발)
    • Long-term stable coherent EUV generation using high-power fiber femtosecond laser (고안정 고가간섭 EUV 펨토초 펄스 생성)
    • Coherent, efficient and compact EUV generation by plamonic field enhancement at metallic nano structures (플라즈모닉 나노 구조에서의 가간섭 고효율 EUV 생성)

Research Highlights (대표 연구실적)

    • N.D. Anh, B.J. Chun, S. Choi, D.-E. Kim, S. Kim and Young-Jin Kim* (corresponding author), "Plasmonic dynamics measured with frequency-comb-referenced phase spectroscopy," Nature Physics, 15, 132-137 (2019) [PDF DOWNLOAD]
    • H.J. Kang, J.-W. Yang, B.J. Chun, H. Jang, B. Kim, Young-Jin Kim* (corresponding author) and S.-W. Kim, "Free-space transfer of comb-rooted optical frequencies over an 18 km free-space link," Nature Communications, 10, 4438 (2019) [PDF DOWNLOAD]
    • X.T. Geng, B.J. Chun, J.H. Seo, K. Seo, H. Yoon, D.E. Kim, Young-Jin Kim* (corresponding author) and S. Kim, "Frequency comb transferred by surface plasmon resonance," Nature Communications, 7, 10685 (2016) [PDF DOWNLOAD]
    • S. Han, H. Kim, Y. W. Kim, Young-Jin Kim, S. Kim, I.-Y. Park and S.-W. Kim*, "High harmonic generation by field-enhanced femtosecond pulses in metal-sapphire nanostructure," Nature Communications, 7, 13105 (2016) [PDF DOWNLOAD]
    • J. Lee*, Young-Jin Kim* (equally contributed first author), K. Lee, S. Lee, and S.-W. Kim, “Time-of-flight measurement with femtosecond light pulses,” Nature Photonics, 4, 716-720 (2010) [PDF DOWNLOAD]
    • I.-Y. Park, S. Kim, J. Choi, D.-H. Lee, Young-Jin Kim, M. F. Kling, M. I. Stockman, and S.-W. Kim, “Plasmonic generation of ultrashort extreme-ultraviolet light pulses,” Nature Photonics, 5, 677-681 (2011) [PDF DOWNLOAD]
    • S. Kim, J. Jin, Young-Jin Kim, I.-Y. Park, Y. Kim, and S.-W. Kim, “High-harmonic generation by resonant plasmon field enhancement,” Nature, 453, 757-760 (2008) [PDF DOWNLOAD]
  • T.-S.D. Le, S. Park, J. An, P.S. Lee and Young-Jin Kim* (corresponding author), "Ultrafast laser pulses enable one-step graphene patterning on woods and leaves for green electronics," Advanced Functional Materials, 2019, 2902771 (2019) [PDF DOWNLOAD]
  • T.-S.D. Le, J. An, Y. Huang, Q. Vo, J. Boonruangkan, T. Tran, S.-W. Kim, G. Sun, and Young-Jin Kim* (corresponding author), "Untrasensitive anti-interference voice recognition by bio-inspired ski-attachable self-cleaning acoustic sensors," ACS Nano, 13, 13293-13303 (2019) [PDF DOWNLOAD]
  • C. Yu, J. An, Q. Chen, J. Zhou, W. Huang, Y.-J. Kim* (corresponding author) and Gengzhi Sun, "Recent advances in design of flexible electrodes for miniaturized supercapacitors," Small Methods, 1900824 (2020) [PDF DOWNLOAD]
  • S. Agarwala, G. L. Goh, L. D. T. Son, J. An, Z. K. Peh, W. Y. Yeong, and Young-Jin Kim* (corresponding author), "Wearable bandage-based strain sensor for home healthcare: combining 3D aerosol jet printing and laser sintering," ACS Sensors, 4, 218-226 (2018) [PDF DOWNLOAD]
  • S. Park, H. Lee, Young-Jin Kim* (corresponding author) and P. S. Lee, "Fully laser-patterned stretchable micro-supercapacitors integrated with soft electronic circuit components," NPG Asia Materials, 10, 959-969 (2018) [PDF DOWNLOAD]
  • J. An, T.-S. Le, C. H. Lim, V.-T. Tran, Z. Zhan, Y. Gao, L. Zheng, G. Sun, and Young-Jin Kim* (corresponding author), "Single-step selective laser writing of flexible photodetectors for wearable optoelectronics," Advanced Science, 5, 1800496 (2018) [PDF DOWNLOAD]
  • J. An, T.-S.D. Le, Y. Huang, Z. Zhan, Y. Li, L. Zheng, W. Huang, G. Sun and Young-Jin Kim* (corresponding author), “All-graphene, flexible, and non-contact electronic skin,” ACS Applied Materials and Interfaces, 9, 44593-44601 (2017) [PDF DOWNLOAD]
    • Y. Gao, H. Lee, W. Xu, J. Jiao, C. Peng, D.-H. Kim, S.-W. Kim and Young-Jin Kim* (corresponding author), "Coherent power amplification of third-order harmonics at thin-layered upconversion nanoparticles," Scientific Reports, 9, 5904 (2019) [PDF DOWNLOAD]
    • H. Jang, B. S. Kim, B. J. Chun, H. J. Kang, Y.-S. Jang, Young-Jin Kim*, and S.-W. Kim* (corresponding author), "Comb-rooted multi-channel synthesis of ultra-narrow optical frequencies of few Hz linewidth," Scientific Reports, 9, 7652 (2019) [PDF DOWNLOAD]
    • H. Farrokhi, T.M. Rohith, J. Boonruangkan, S. Han, H. Kim, S.-W. Kim, and Young-Jin Kim* (corresponding author), "High-brightness laser imaging with tunable speckle reduction enabled by electroactive micro-optic diffusers," Scientific Reports, 7, 15318 (2017) [PDF DOWNLOAD]
    • J. An, Z. Zhan, G. Sun, H.K.S.V. Mohan, J. Zhou, Young-Jin Kim* (corresponding author) and L. Zheng, "Direct Preparation of Carbon Nanotube Intramolecular Junctions on Structured Substrates," Scientific Reports, 6, 38032 (2016) [PDF DOWNLOAD]
    • Y.-S. Jang, G. Wang, H.-J. Kang, B. J. Chun, Young-Jin Kim, and S.-W. Kim, "Comb-referenced laser distance interferometer for industrial nanotechnology," Scientific Reports, 6, 31770 (2016) [PDF DOWNLOAD]
    • P. Kim, M.S. Nguyen, O. Kwon, Young-Jin Kim, and Y.-J. Yoon, "Phase-dependent dynamic potential of magnetically coupled two-degree-of-freedom bistable energy harvester," Scientific Reports, 6, 34411 (2016) [PDF DOWNLOAD]
    • K. Lee, J. Lee, Y. Jang, S. Han, H. Jang, Young-Jin Kim, and S.-W. Kim, "Fourier-transform spectroscopy using an Er-doped fiber femtosecond laser by sweeping the pulse repetition rate," Scientific Reports, 5, 15726 (2015) [PDF DOWNLOAD]
    • J. Lee, K. Lee, Y. Jang, H. Jang, S. Han, S.-H. Lee, K.-I. Kang, C.-W. Lim, Young-Jin Kim* (corresponding author) and S.-W. Kim*, "Testing of a femtosecond pulse laser in outer space," Scientific Reports, 4, 5134 (2014) [PDF DOWNLOAD]

News and Video Clips (뉴스 및 동영상 자료)

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